Journal Guide

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The Journal of Micro/Nanolithography, MEMS, and MOEMS (JM3) publishes peer-reviewed papers on the science, development, and practice of lithographic, fabrication, packaging, and integration technologies necessary to address the needs of the electronics, microeletromechanical systems, micro-optoelectromechanical systems, and photonics industries. The wide range of such devices also includes biomedical microdevices, microfluidics, sensors and actuators, adaptive optics, and digital micromirrors. The scope is broad to facilitate synergy and interest between the communities served by the journal. Lithography: tools, materials, and processes associated with the patterning of structures that have submicrometer and nanometer-scale features. Included are imaging and nonimaging approaches using optics, electron and other particle beams, nanoimprint, molecular self-assembly, and their hybrids. Applications include semiconductor fabrication, but also patterning for other micro/nanodevices. Microelectromechanical systems (MEMS): the design, fabrication, operation, reliability, and testing of microdevices that contain both electrical and mechanical elements. Micro-optoelectromechanical systems (MOEMS): the design, fabrication, operation, reliability, and testing of microdevices that contain electrical, mechanical, and optical elements (that is, the merging of micro-optics and MEMS). Microfabrication: technologies to shape three-dimensional structures leading to the fabrication of active and passive electronics, photonics, MEMS, MOEMS, micro/nano-optics, and other micro/nanodevices. Metrology: metrology and process control for the above devices and their fabrication processes.

The Journal of the Microwave Power Energy (JMPEE) is a quarterly publication of the International Microwave Power Institute (IMPI), aimed to be one of the primary sources of the most reliable information in the arts and sciences of microwave and RF technology. JMPEE provides space to engineers and researchers for presenting papers about non-communication applications of microwave and RF, mostly industrial, scientific, medical and instrumentation. Topics include, but are not limited to: applications in materials science and nanotechnology, characterization of biological tissues, food industry applications, green chemistry, health and therapeutic applications, microwave chemistry, microwave processing of materials, soil remediation, and waste processing.

The journal includes papers in the following areas:– Simple organic liquids and mixtures– Ionic liquids– Surfactant solutions (including micelles and vesicles) and liquid interfaces– Colloidal solutions and nanoparticles– Thermotropic and lyotropic liquid crystals– Ferrofluids– Water, aqueous solutions and other hydrogen-bonded liquids– Lubricants, polymer solutions and melts– Molten metals and salts– Phase transitions and critical phenomena in liquids and confined fluids– Self assembly in complex liquids.– Biomolecules in solutionThe emphasis is on the molecular (or microscopic) understanding of particular liquids or liquid systems, especially concerning structure, dynamics and intermolecular forces. The experimental techniques used may include:– Conventional spectroscopy (mid-IR and far-IR, Raman, NMR, etc.)– Non-linear optics and time resolved spectroscopy (psec, fsec, asec, ISRS, etc.)– Light scattering (Rayleigh, Brillouin, PCS, etc.)– Dielectric relaxation– X-ray and neutron scattering and diffraction.Experimental studies, computer simulations (MD or MC) and analytical theory will be considered for publication; papers just reporting experimental results that do not contribute to the understanding of the fundamentals of molecular and ionic liquids will not be accepted.